DEFINITION OF PHOTORESIST AND TYPES

• Photoresist is a viscous polymer resin (solution) containing some photochemical active polymer(PAC)

• Two types of Photoresist

  • Negative
  • Positive

• Spin coating most common method of putting Photoresist on wafer

• Photoresist material is irradiated using photons(photolithography), electrons(e-beam lithography) and X-rays(X-ray lithography)

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