THE PHOTORESIST PROCESS AND IT’S APPLICATION TO THE SEMICONDUCTOR INDUSTRY

4/19/00


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Table of Contents

THE PHOTORESIST PROCESS AND IT’S APPLICATION TO THE SEMICONDUCTOR INDUSTRY

AGENDA

DEFINITION OF PHOTORESIST AND TYPES

TYPES OF PHOTORESIST AND PROCESS

TYPES OF PHOTORESIST AND PROCESS

POSITIVE AND NEGATIVE RESIST

TYPES OF PHOTORESIST MATERIALS

TYPES OF PHOTORESIST MATERIALS(one-component positive)

TYPES OF PHOTORESIST MATERIALS(one-component negative)

TYPES OF PHOTORESIST MATERIALS (one-component negative)

TYPES OF PHOTORESIST MATERIALS(two-component negative)

TYPES OF PHOTORESIST MATERIALS (two-component negative)

TYPES OF PHOTORESIST MATERIALS(two-component positive)

TYPES OF PHOTORESIST MATERIALS (two-component positive)

MICROLITHOGRAPHY PROCESS STEPS

THERMAL OXIDATION

PHOTORESIST LAYER

MASKING AND IRRADIATION

ETCHING PROCESS

ETCHING PROCESS

MICROLITHOGRAPHY PROCESS STEPS

MICROLITHOGRAPHY PROCESS STEPS

DOPING PROCESS

FINAL MICROPROCESSOR

IMPORTANCE OF PHOTORESIST MATERIAL

CORPORATIONS INVOLVED IN NEW POLYMER DESIGNS

APPLICATIONS OF PHOTORESIST (SEMICONDUCTORS)

CORPORATIONS USING TECHNOLOGY

CONCLUSIONS OF PHOTORESIST PROCESS

 Author: Authorized Gateway Customer

Email: lsmartin@acsu.buffalo.edu

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